0.4-1.1 < Ωcm >

Resistivity

≤7.5E + 17 < at/cm³ >

Oxygen Content

≥70 < µs >

Minority Carrier Lifetime

≤ 5E + 16 < at/ cm³ >

Carbon Content

Materials Performance

Item

Specification

Inspection Method

Growth Mode

CZ

--

Conductive Type

P-type

P/N type tester

Size

M10: 182.2* 182.2*φ247mm G12 : 210* 210*φ295mm

Wafer inspection system

Thickness

M10：155 ± 10 μm 150 ± 10 μm G12：150 ± 10 μm

Wafer inspection system

Electrical Property

Item

Specification

Inspection Method

Electrical resistivity

0.4-1.1 Ω.cm

Wafer inspection system

Minority carrier lifetime

≥70us

QSSPC/Transient with injection level: 1E15 cm-3（Sinton BCT-400 ）

Oxygen content

≤7.5E + 17 at/cm³

FTIR spectrometer

Carbon Content

≤ 5E + 16 at/cm³

FTIR spectrometer

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