0.4-1.1
Resistivity
≤7.5E + 17
Oxygen Content
≥70
Minority Carrier Lifetime
≤ 5E + 16
Carbon Content
Materials Performance
Item |
Specification |
Inspection Method |
|---|---|---|
|
Growth Mode |
CZ |
-- |
|
Conductive Type |
P-type |
P/N type tester |
|
Size |
M10: 182.2* 182.2*φ247mm G12 : 210* 210*φ295mm |
Wafer inspection system |
|
Thickness |
M10:155 ± 10 μm 150 ± 10 μm G12:150 ± 10 μm |
Wafer inspection system |
Electrical Property
Item |
Specification |
Inspection Method |
|---|---|---|
|
Electrical resistivity |
0.4-1.1 Ω.cm |
Wafer inspection system |
|
Minority carrier lifetime |
≥70us |
QSSPC/Transient with injection level: 1E15 cm-3(Sinton BCT-400 ) |
|
Oxygen content |
≤7.5E + 17 at/cm³ |
FTIR spectrometer |
|
Carbon Content |
≤ 5E + 16 at/cm³ |
FTIR spectrometer |
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