0.4-1.6 < Ω.cm >

Resistivity

≤6E + 17 < at/cm³ >

Oxygen Content

≤5E + 16 < at/cm³ >

Carbon Content

≥1000 < µs >

Minority Carrier Lifetime

Materials Performance

Item

Specification

Inspection Method

Growth Mode

CZ

--

Crystallinity

Monocrystalline

--

Physical dimensions

M10 :182.2* 182.2*φ247mm M10-L :182.2* 183.75*φ247mm

Wafer inspection system

Thickness

130±8 µm

Wafer inspection system

Electrical Property

Item

Specification

Inspection Method

Electrical resistivity

0.4-1.6 Ω.cm

Wafer inspection system

Minority Carrier Lifetime

≥1000/μs

Transient with injection level: 5E14 cm-3(Sinton BCT-400 )

Oxygen Content

≤6E+17 at/cm³

FTIR spectrometer

Carbon Content

≤5E+16 at/cm³

FTIR spectrometer

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