0.4-1.6
Resistivity
≤6E + 17
Oxygen Content
≤5E + 16
Carbon Content
≥1000
Minority Carrier Lifetime
Materials Performance
Item |
Specification |
Inspection Method |
|---|---|---|
|
Growth Mode |
CZ |
-- |
|
Crystallinity |
Monocrystalline |
-- |
|
Physical dimensions |
M10 :182.2* 182.2*φ247mm M10-L :182.2* 183.75*φ247mm |
Wafer inspection system |
|
Thickness |
130±8 µm |
Wafer inspection system |
Electrical Property
Item |
Specification |
Inspection Method |
|---|---|---|
|
Electrical resistivity |
0.4-1.6 Ω.cm |
Wafer inspection system |
|
Minority Carrier Lifetime |
≥1000/μs |
Transient with injection level: 5E14 cm-3（Sinton BCT-400 ） |
|
Oxygen Content |
≤6E+17 at/cm³ |
FTIR spectrometer |
|
Carbon Content |
≤5E+16 at/cm³ |
FTIR spectrometer |
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